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The physics of submicron lithography Kamil A. Valiev

By: Material type: TextTextSeries: Microdevices: physics and fabrication technologiesPublication details: New York Plenum Press 1992Description: xi, 493pISBN:
  • 0-306-43578-0
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Item type Current library Shelving location Call number Status Date due Barcode
Books Books IIA Library-Bangalore General Stacks 621.38/ VAL (Browse shelf(Opens below)) Available 14345

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