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The physics of submicron lithography

Valiev, Kamil A

The physics of submicron lithography Kamil A. Valiev - New York Plenum Press 1992 - xi, 493p. - Microdevices: physics and fabrication technologies .

ISBN: 0-306-43578-0

Subjects--Topical Terms:
Electronics
Lithography
Physics

Universal Decimal Class. No.: 621.38 / VAL

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