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Optical Metrology: A Critical Review [eBook] by
  • Al-Jumaily, Ghanim, ed
Series: Proceedings of SPIE; V. 10294
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1999
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Micro- and Nanometrology III [eBook] by
  • Gorecki, Christophe, ed
Series: Proceedings of SPIE; V. 7718
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 2010
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Micro- and Nanometrology in Manufacturing Technology [eBook] by
  • Gorecki, Christophe, ed
Series: Proceedings of SPIE; V. 5458
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 2004
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Micro- and Nanometrology in Microsystems Technology [eBook] by
  • Gorecki, Christophe, ed
Series: Proceedings of SPIE; V. 6188
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 2006
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Micro- and Nanometrology in Microsystems Technology II [eBook] by
  • Gorecki, Christophe, ed
Series: Proceedings of SPIE; V. 6995
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 2008
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Micro- and Nanometrology IV [eBook] by
  • Gorecki, Christophe, ed
Series: Proceedings of SPIE; V. 8430
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 2012
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Micro- and Nanometrology V [eBook] by
  • Gorecki, Christophe, ed
Series: Proceedings of SPIE; V. 9132
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 2014
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Micro- and Nanometrology VI [eBook] by
  • Gorecki, Christophe, ed
Series: Proceedings of SPIE; V. 9890
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 2016
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Micro- and Nanometrology VII [eBook] by
  • Gorecki, Christophe, ed
Series: Proceedings of SPIE; V. 10678
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 2018
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection [eBook] by
  • Stover, Harry, ed
Series: Proceedings of SPIE; V. 0811
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1987
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithography and Metrology for Microcircuit Fabrication [eBook] by
  • Lacombat, Michel, ed
Series: Proceedings of SPIE; V. 1138
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1989
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithography I: Technology for the Mid-1980s [eBook] by
  • Stover, Harry, ed
Series: Proceedings of SPIE; V. 0334
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1982
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithography II: Technology for the 1980s [eBook] by
  • Stover, Harry, ed
Series: Proceedings of SPIE; V. 0394
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1983
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithography III: Technology for the Next Decade [eBook] by
  • Stover, Harry, ed
Series: Proceedings of SPIE; V. 0470
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1984
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithography IV [eBook] by
  • Stover, Harry, ed
Series: Proceedings of SPIE; V. 0538
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1985
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithography IX [eBook] by
  • Fuller, Gene, ed
Series: Proceedings of SPIE; V. 2726
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1996
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithography V [eBook] by
  • Stover, Harry, ed
Series: Proceedings of SPIE; V. 0633
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1986
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithography VI [eBook] by
  • Stover, Harry, ed
Series: Proceedings of SPIE; V. 0772
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1987
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithography X [eBook] by
  • Fuller, Gene, ed
Series: Proceedings of SPIE; V. 3051
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1997
Availability: Items available for loan: IIA Library-Bangalore (1).

Optical Microlithography XI [eBook] by
  • Van den Hove, Luc, ed
Series: Proceedings of SPIE; V. 3334
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1998
Availability: Items available for loan: IIA Library-Bangalore (1).

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