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Optical Micro- and Nanometrology in Microsystems Technology II [eBook]

By: Material type: TextTextSeries: Proceedings of SPIE; V. 6995Publication details: Washington, USA SPIE 2008Description: Online resourceISBN:
  • 9780819471932 (Print)
Online resources:
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Item type Current library Call number Vol info URL Status Date due Barcode
eBooks eBooks IIA Library-Bangalore V. 6995 Link to resource Available EB9308

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