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Developments in Semiconductor Microlithography IV [eBook] by
  • Dey, James, ed
Series: Proceedings of SPIE; V. 0174
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1979
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Availability: Items available for loan: IIA Library-Bangalore (1).

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Developments in Semiconductor Microlithography V [eBook] by
  • Dey, James, ed
Series: Proceedings of SPIE; V. 0221
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1980
Online access:
Availability: Items available for loan: IIA Library-Bangalore (1).

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Semiconductor Microlithography VI [eBook] by
  • Dey, James, ed
Series: Proceedings of SPIE; V. 0275
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1981
Online access:
Availability: Items available for loan: IIA Library-Bangalore (1).

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