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Materials and Device Characterization in Micromachining [eBook] by
  • Friedrich, Craig, ed
Series: Proceedings of SPIE; V. 3512
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1998
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Availability: Items available for loan: IIA Library-Bangalore (1).

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Microlithography and Metrology in Micromachining III [eBook] by
  • Friedrich, Craig, ed
Series: Proceedings of SPIE; V. 3225
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1997
Online access:
Availability: Items available for loan: IIA Library-Bangalore (1).

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