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		Handbook of Critical Dimension Metrology and Process Control: A Critical Review [eBook] by Monahan, Kevin, ed Series: Proceedings of SPIE; V. 10274 Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 1994 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article
		Integrated Circuit Metrology, Inspection, & Process Control [eBook] by Monahan, Kevin, ed Series: Proceedings of SPIE; V. 0775 Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 1987 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article
		Integrated Circuit Metrology, Inspection, and Process Control II [eBook] by Monahan, Kevin, ed Series: Proceedings of SPIE; V. 0921 Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 1988 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article
		Integrated Circuit Metrology, Inspection, and Process Control III [eBook] by Monahan, Kevin, ed Series: Proceedings of SPIE; V. 1087 Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 1989 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article
		Micron and Submicron Integrated Circuit Metrology [eBook] by Monahan, Kevin, ed Series: Proceedings of SPIE; V. 0565 Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 1986 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article

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