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Device and Process Technologies for MEMS and Microelectronics [eBook] by
  • Chau, Kevin, ed
Series: Proceedings of SPIE; V. 3892
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1999
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Availability: Items available for loan: IIA Library-Bangalore (1).

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Micromachined Devices and Components II [eBook] by
  • Chau, Kevin, ed
Series: Proceedings of SPIE; V. 2882
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1996
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Availability: Items available for loan: IIA Library-Bangalore (1).

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Micromachined Devices and Components III [eBook] by
  • Chau, Kevin, ed
Series: Proceedings of SPIE; V. 3224
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1997
Online access:
Availability: Items available for loan: IIA Library-Bangalore (1).

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Micromachining and Microfabrication [eBook] by
  • Chau, Kevin, ed
Series: Proceedings of SPIE; V. 4230
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 2000
Online access:
Availability: Items available for loan: IIA Library-Bangalore (1).

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