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Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing [eBook] by
  • Peckerar, Martin, ed
Series: Proceedings of SPIE; V. 1465
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1991
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Availability: Items available for loan: IIA Library-Bangalore (1).

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Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II [eBook] by
  • Peckerar, Martin, ed
Series: Proceedings of SPIE; V. 1671
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 1992
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Availability: Items available for loan: IIA Library-Bangalore (1).

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Nanostructure Science, Metrology, and Technology [eBook] by
  • Peckerar, Martin, ed
Series: Proceedings of SPIE; V. 4608
Material type: Text Text; Format: electronic ; Literary form: Not fiction
Publication details: Washington, USA SPIE 2002
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Availability: Items available for loan: IIA Library-Bangalore (1).

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