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		Extreme Ultraviolet Lithography [eBook] by Levinson, Harry J Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 2020 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article
		Lithography Process Control [eBook] by Levinson, Harry J Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 1999 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article
		Principles of Lithography [eBook] by Levinson, Harry J Edition: 2nd ed. Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 2005 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article
		Principles of Lithography [eBook] by Levinson, Harry J Edition: 3rd ed. Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 2010 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article
		Principles of Lithography [eBook] by Levinson, Harry J Edition: 4th ed. Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 2019 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article

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