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		35th European Mask and Lithography Conference (EMLC 2019) [eBook] by Behringer, Uwe, ed Series: Proceedings of SPIE; V. 11177 Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 2019 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article
		MEMS Design, Fabrication, Characterization, and Packaging [eBook] by Behringer, Uwe, ed Series: Proceedings of SPIE; V. 4407 Material type: Text; Format: electronic ; Literary form: Not fiction Publication details: Washington, USA SPIE 2001 Online access: Click Here to Access eBook Availability: Items available for loan: IIA Library-Bangalore (1). Request article

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