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Metrology-based Control for Micro-Manufacturing [eBook]

By: Material type: TextTextSeries: Proceedings of SPIE; V. 4275Publication details: Washington, USA SPIE 2001Description: Online resourceISBN:
  • 9780819439536 (Print)
Online resources:
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Item type Current library Call number Vol info URL Status Date due Barcode
eBooks eBooks IIA Library-Bangalore V. 4275 Link to resource Available EB7657

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