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Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology

Varadan, Vijay, ed.

Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology [eBook] - Washington, USA SPIE 2004 - Online resource - Proceedings of SPIE; V. 5389 .

ISBN: 9780819453068 (Print)

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