Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Varadan, Vijay, ed.
Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology [eBook] - Washington, USA SPIE 2003 - Online resource - Proceedings of SPIE; V. 5055 .
9780819448606 (Print)
Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology [eBook] - Washington, USA SPIE 2003 - Online resource - Proceedings of SPIE; V. 5055 .
9780819448606 (Print)