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Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII

Shea, Herbert, ed.

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII [eBook] - Washington, USA SPIE 2014 - Online resource - Proceedings of SPIE; V. 8975 .

ISBN: 9780819498885 (Print)

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