Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
García-Blanco, Sonia, ed.
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI [eBook] - Washington, USA SPIE 2012 - Online resource - Proceedings of SPIE; V. 8250 .
9780819488930 (Print)
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI [eBook] - Washington, USA SPIE 2012 - Online resource - Proceedings of SPIE; V. 8250 .
9780819488930 (Print)