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Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X

García-Blanco, Sonia, ed.

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X [eBook] - Washington, USA SPIE 2011 - Online resource - Proceedings of SPIE; V. 7928 .

ISBN: 9780819484659 (Print)

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