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Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX

Kullberg, Richard, ed.

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX [eBook] - Washington, USA SPIE 2010 - Online resource - Proceedings of SPIE; V. 7592 .

ISBN: 9780819479884 (Print)

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