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Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications

Weck, Manfred, ed.

Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications [eBook] - Washington, USA SPIE 1987 - Online resource - Proceedings of SPIE; V. 0803 .

ISBN: 9780892528387 (Print)

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