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MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly

Courtois, Bernard, ed.

MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly [eBook] - Washington, USA SPIE 2003 - Online resource - Proceedings of SPIE; V. 4945 .

ISBN: 9780819447401 (Print)

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