Normal view MARC view ISBD view

Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III

Patterson, David, ed.

Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III [eBook] - Washington, USA SPIE 1993 - Online resource - Proceedings of SPIE; V. 1924 .

ISBN: 9780819411587 (Print)

Print
Request article
Suggest for purchase
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)