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Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Courtois, Bernard, ed.

Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 [eBook] - Washington, USA SPIE 2001 - Online resource - Proceedings of SPIE; V. 4408 .

ISBN: 9780819441096 (Print)

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