Design, Test, and Microfabrication of MEMS and MOEMS
Ehrfeld, Wolfgang, ed.
Design, Test, and Microfabrication of MEMS and MOEMS [eBook] - Washington, USA SPIE 1999 - Online resource - Proceedings of SPIE; V. 3680 .
9780819431547 (Print)
Design, Test, and Microfabrication of MEMS and MOEMS [eBook] - Washington, USA SPIE 1999 - Online resource - Proceedings of SPIE; V. 3680 .
9780819431547 (Print)