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2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications

Zhou, Zhaoying, ed.

2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications [eBook] - Washington, USA SPIE 2009 - Online resource - Proceedings of SPIE; V. 7510 .

ISBN: 9780819478962 (Print)

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