000 00598nam a2200205Ia 4500
003 IN-BaIIA
008 211028s9999 xx 000 0 eng d
020 _a0-87909-668-3
040 _cIIA Library
080 _a621.382
_bGIS
100 _aGise, Peter E
_911272
245 0 _aSemiconductor and integrated circuit fabrication techniques
_cPeter E. Gise and Richard Blanchard 
260 _aVirginia
_bReston Publications
_c1979
300 _aix, 209p.
650 _aCircuits
_91974
650 _aNASA Thesaurus
650 _aSemiconductors
700 _aBlanchard, Richard
_911273
942 _cBK
999 _c6584
_d6584