000 00548nai a2200169Ia 4500
003 IN-BaIIA
008 211028c9999 xx s 000 0 eng d
022 _a0167-9317 (Online)
040 _cIIA Library
245 0 _aMicroelectronic Engineering
_h[eJournal]
260 _aNew York
_bElsevier
310 _a16/year
362 _a26(2); 1995 - Present
521 _bSubscribed through National Knowledge Resource Consortium (NKRC)
856 _uhttps://www.sciencedirect.com/science/journal/01679317
_yClick Here to Access eJournal
942 _cEJ
999 _c35351
_d35351