| 000 | 00606nai a2200181Ia 4500 | ||
|---|---|---|---|
| 003 | IN-BaIIA | ||
| 008 | 211028c9999 xx s 000 0 eng d | ||
| 022 | _a1932-5134 (Online) | ||
| 022 | _a1932-5150 (Print) | ||
| 040 | _cIIA Library | ||
| 245 | 0 |
_aJournal of Micro/Nanolithography, MEMS, and MOEMS _h[eJournal] |
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| 260 |
_aWashington _bSPIE |
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| 310 | _aQuarterly | ||
| 362 | _a1(1); 2002 - Present | ||
| 521 | _bSubscribed through IIA Library | ||
| 856 |
_uhttps://www.spiedigitallibrary.org/journals/journal-of-micro-nanolithography-mems-and-moems _yClick Here to Access eJournal |
||
| 942 | _cEJ | ||
| 999 |
_c35133 _d35133 |
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