000 00572nam a2200193Ia 4500
003 IN-BaIIA
008 211028s9999 xx 000 0 eng d
020 _a0-08-012440-2
040 _cIIA Library
080 _a533.5
_bHAN-3
245 0 _aHandbook of vacuum physics
_bvol. 3, technology
_cedited by Beck A. H.
260 _aOxford
_bPergamon Press
_c1964
300 _aviii, 195-270p.
650 _aNASA thesaurus
650 _aVacuum
_92392
650 _aVacuum gases
_94554
700 _aBeck, A. H .,ed.
_96122
942 _cBK
999 _c3459
_d3459