000 00588nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819404046 (Print)
040 _cIIA Library
100 _a, ed.
_928975
245 0 _aX-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography
_h[eBook]
260 _aWashington, USA
_bSPIE
_c1991
300 _aOnline resource
490 _aProceedings of SPIE; V. 1343
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1343
_yClick Here to Access eBook
942 _cEB
999 _c33892
_d33892