000 00575nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819429810 (Print)
040 _cIIA Library
100 _aHarding, Kevin, ed.
245 0 _aThree-Dimensional Imaging, Optical Metrology, and Inspection IV
_h[eBook]
260 _aWashington, USA
_bSPIE
_c1998
300 _aOnline resource
490 _aProceedings of SPIE; V. 3520
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3520
_yClick Here to Access eBook
942 _cEB
999 _c33290
_d33290