000 00546nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780892524365 (Print)
040 _cIIA Library
100 _aJacobsson, Roland, ed.
_948376
245 0 _aThin Film Technologies I
_h[eBook]
260 _aWashington, USA
_bSPIE
_c1983
300 _aOnline resource
490 _aProceedings of SPIE; V. 0401
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0401
_yClick Here to Access eBook
942 _cEB
999 _c33200
_d33200