000 00558nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819400444 (Print)
040 _cIIA Library
100 _aBennett, Jean, ed.
_948181
245 0 _aSurface Measurement and Characterization
_h[eBook]
260 _aWashington, USA
_bSPIE
_c1989
300 _aOnline resource
490 _aProceedings of SPIE; V. 1009
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1009
_yClick Here to Access eBook
942 _cEB
999 _c32875
_d32875