000 00620nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781510631427 (Print)
020 _a9781510631434 (Online)
040 _cIIA Library
100 _aSimpson, Cather, ed.
_948105
245 0 _aSPIE Micro + Nano Materials, Devices, and Applications 2019
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2020
300 _aOnline resource
490 _aProceedings of SPIE; V. 11201
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11201
_yClick Here to Access eBook
942 _cEB
999 _c32770
_d32770