000 00535nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819426802 (Print)
040 _cIIA Library
100 _aHariz, Alex, ed.
245 0 _aSmart Electronics and MEMS
_h[eBook]
260 _aWashington, USA
_bSPIE
_c1997
300 _aOnline resource
490 _aProceedings of SPIE; V. 3242
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3242
_yClick Here to Access eBook
942 _cEB
999 _c32410
_d32410