000 00582nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819443410 (Print)
040 _cIIA Library
100 _aChen, David, ed.
_947669
245 0 _aSemiconductor Optoelectronic Device Manufacturing and Applications
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2001
300 _aOnline resource
490 _aProceedings of SPIE; V. 4602
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4602
_yClick Here to Access eBook
942 _cEB
999 _c32055
_d32055