| 000 | 00588nam a2200181Ia 4500 | ||
|---|---|---|---|
| 003 | IN-BaIIA | ||
| 008 | 211028s9999 xx s 000 0 eng d | ||
| 020 | _a9781510634213 (Print) | ||
| 020 | _a9781510634220 (Online) | ||
| 040 | _cIIA Library | ||
| 100 |
_aOwa, Soichi, ed. _946464 |
||
| 245 | 0 |
_aOptical Microlithography XXXIII _h[eBook] |
|
| 260 |
_aWashington, USA _bSPIE _c2020 |
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| 300 | _aOnline resource | ||
| 490 | _aProceedings of SPIE; V. 11327 | ||
| 856 |
_uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11327 _yClick Here to Access eBook |
||
| 942 | _cEB | ||
| 999 |
_c29885 _d29885 |
||