000 00594nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781510618824 (Print)
020 _a9781510618831 (Online)
040 _cIIA Library
100 _aGorecki, Christophe, ed.
245 0 _aOptical Micro- and Nanometrology VII
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2018
300 _aOnline resource
490 _aProceedings of SPIE; V. 10678
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10678
_yClick Here to Access eBook
942 _cEB
999 _c29852
_d29852