000 00552nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819491220 (Print)
040 _cIIA Library
100 _aGorecki, Christophe, ed.
245 0 _aOptical Micro- and Nanometrology IV
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2012
300 _aOnline resource
490 _aProceedings of SPIE; V. 8430
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8430
_yClick Here to Access eBook
942 _cEB
999 _c29849
_d29849