000 00575nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819493187 (Print)
040 _cIIA Library
100 _aHarding, Kevin, ed.
245 0 _aOptical Metrology and Inspection for Industrial Applications II
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2013
300 _aOnline resource
490 _aProceedings of SPIE; V. 8563
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8563
_yClick Here to Access eBook
942 _cEB
999 _c29835
_d29835