000 00576nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819477224 (Print)
040 _cIIA Library
100 _aHuang, Peisen, ed.
_946317
245 0 _aOptical Inspection and Metrology for Non-Optics Industries
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2009
300 _aOnline resource
490 _aProceedings of SPIE; V. 7432
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7432
_yClick Here to Access eBook
942 _cEB
999 _c29665
_d29665