000 00583nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819486059 (Print)
040 _cIIA Library
100 _aGeorge, Thomas, ed.
_945431
245 0 _aMicro- and Nanotechnology Sensors, Systems, and Applications III
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2011
300 _aOnline resource
490 _aProceedings of SPIE; V. 8031
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8031
_yClick Here to Access eBook
942 _cEB
999 _c28212
_d28212