000 00575nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819462794 (Print)
040 _cIIA Library
100 _aGeorge, Thomas, ed.
_945422
245 0 _aMicro (MEMS) and Nanotechnologies for Space Applications
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2006
300 _aOnline resource
490 _aProceedings of SPIE; V. 6223
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6223
_yClick Here to Access eBook
942 _cEB
999 _c28199
_d28199