000 00574nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819413048 (Print)
040 _cIIA Library
100 _aBoyd, Ian, ed.
_941257
245 0 _aLaser-Assisted Fabrication of Thin Films and Microstructures
_h[eBook]
260 _aWashington, USA
_bSPIE
_c1994
300 _aOnline resource
490 _aProceedings of SPIE; V. 2045
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2045
_yClick Here to Access eBook
942 _cEB
999 _c27394
_d27394