000 00564nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780892526468 (Print)
040 _cIIA Library
100 _aSwenson, Edward, ed.
_944724
245 0 _aLaser Processing of Semiconductors & Hybrids
_h[eBook]
260 _aWashington, USA
_bSPIE
_c1986
300 _aOnline resource
490 _aProceedings of SPIE; V. 0611
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0611
_yClick Here to Access eBook
942 _cEB
999 _c27248
_d27248