000 00579nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819406460 (Print)
040 _cIIA Library
100 _aZhou, Shixun, ed.
_944480
245 0 _aInternational Conference on Thin Film Physics and Applications
_h[eBook]
260 _aWashington, USA
_bSPIE
_c1991
300 _aOnline resource
490 _aProceedings of SPIE; V. 1519
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1519
_yClick Here to Access eBook
942 _cEB
999 _c26933
_d26933