000 00573nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819428592 (Print)
040 _cIIA Library
100 _aRastogi, Pramod, ed.
_944424
245 0 _aInternational Conference on Applied Optical Metrology
_h[eBook]
260 _aWashington, USA
_bSPIE
_c1998
300 _aOnline resource
490 _aProceedings of SPIE; V. 3407
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3407
_yClick Here to Access eBook
942 _cEB
999 _c26842
_d26842