000 00574nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780892528370 (Print)
040 _cIIA Library
100 _aLangenbeck, Peter, ed.
_944295
245 0 _aIn-Process Optical Metrology for Precision Machining
_h[eBook]
260 _aWashington, USA
_bSPIE
_c1987
300 _aOnline resource
490 _aProceedings of SPIE; V. 0802
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0802
_yClick Here to Access eBook
942 _cEB
999 _c26599
_d26599