000 00468nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx 000 0 eng d
040 _cIIA Library
080 _a533.5
_bVAN
100 _aVan Atta, C. M.
_94553
245 0 _aVacuum science and engineering
_cC M van Atta
260 _aNew York
_bMcGraw-Hill
_c1965
300 _axiv, 459p.
650 _aNASA Thesaurus
650 _aVacuum gases
_94554
650 _aVacuum systems
942 _cBK
999 _c2560
_d2560