000 00580nam a2200169Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9780819499929 (Print)
040 _cIIA Library
100 _aVeiko, Vadim, ed.
_942694
245 0 _aFundamentals of Laser-Assisted Micro- and Nanotechnologies 2013
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2013
300 _aOnline resource
490 _aProceedings of SPIE; V. 9065
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/9065
_yClick Here to Access eBook
942 _cEB
999 _c25593
_d25593