000 00599nam a2200181Ia 4500
003 IN-BaIIA
008 211028s9999 xx s 000 0 eng d
020 _a9781510608436 (Print)
020 _a9781510608443 (Online)
040 _cIIA Library
100 _aSwatowska, Barbara, ed.
_943124
245 0 _aElectron Technology Conference 2016
_h[eBook]
260 _aWashington, USA
_bSPIE
_c2017
300 _aOnline resource
490 _aProceedings of SPIE; V. 10175
856 _uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10175
_yClick Here to Access eBook
942 _cEB
999 _c24946
_d24946